Evergrace Intelligent Technology Co.,Ltd., Ltd.is a national high-tech enterprise, a national technology-based small and medium-sized enterprise, an innovative small and medium-sized enterprise, a specialized, refined, distinctive and innovative small and medium-sized enterprise in Hubei Province, a gazelle enterprise and an intellectual property demonstration enterprise, specializing in the research and development and production of ultra-high-purity gas purification equipment. It belongs to the project of domestic substitution of semiconductor equipment. The company has a comprehensive grasp of the ultra-high purity purification technology for various bulk gases and special gases. Its products have been applied to multiple key 12-inch semiconductor projects in China.

Traffic:5~4000LPM
It uses a small flow rate, does not require automatic regeneration, and does not need to remove CH. It is recommended to choose the P series

Traffic:0.2~150LPM
The flow rate is small and CH needs to be removed. It is recommended to choose the H series

Traffic:10~50000CMH
It requires a large flow rate, fully automatic operation, and 24-hour continuous gas supply. It is recommended to choose the S series

Large-scale integrated circuit manufacturing
Typical gases: N2, O2, H2, Ar, He, XCDA, CO2...
Manufacturing of semiconductor discrete devices
Typical gases: N2, H2, O2...
Panel and display production
Typical gases: N2, O2, H2, Ar, He...
LED and laser manufacturing
Typical gases: N2, H2, NH3...
Production of ultra-high purity gases, mixed gases and standard gases
Typical gases: N2, Ar, He, H2...
Welding and purging of clean pipelines
Typical gases: N2, Ar...