EGS9 NITROGEN PURIFIER

•Flow range: 10-20000Nm3/h

•High precision filter:0.003μm

•Outlet impurities<1ppb

•Fully automatic operation with 24-hour uninterrupted gas supply.

•Remove CH4 impurity

•Service life over 20 years

•316L SS EP Vessel

•Customized according to the different needs of customers

APPLICABLE GAS

N₂

MODEL

EGS9

CRAFTS

CAT+ADS

IMPURITY

INLET

OUTLET

ppm

ppb

H₂O

<5

<1

O₂

<3

<1

co

<1

<1

CO₂

<1

<1

H₂

<2

<1

CH₄

<0.5

<1

NMHC

<1

<1

PARTICLES

—

≤1pcs/m³(@0.003μm)

FLOW RANGE

—

10-20000Nm³h

Flow range

Nm³/h

Applicable gas

Crafts

Pressure Range

Bar

Reference Dimensions

mm

10-70

N₂

1 x CAT + 2 x ADS

3.5-10

1200*1200*1900

80-150

N₂

1 x CAT + 2 x ADS

3.5-10

1450*1450*2050

200-300

N₂

1 x CAT + 2 x ADS

3.5-10

1650*2000*2300

400-700

N₂

1 x CAT + 2 x ADS  

3.5-10

1900*2300*2500

800-1000

N₂

1 x CAT + 2 x ADS  

3.5-10

2000*2600*2500

1500-2000

N₂

1 x CAT + 2 x ADS  

3.5-10

4200*2390*2700

2500-3000

N₂

1 x CAT + 2 x ADS  

3.5-10

4200*2720*2700

3000-4000

N₂

1 x CAT + 2 x ADS  

3.5-10

5000*2750*2750

5000-6000

N₂

1 x CAT + 2 x ADS  

3.5-10

6000*2750*2750

7000-10000

N₂

1 x CAT + 2 x ADS  

3.5-10

9000*2900*2750

• Large Scale Integration

• Preform Fabrication

• Discrete Device

• Semiconductor Equipment Integration‌

• Silicon Wafers 、Substrate and Epitaxy

• Ultra-pure,mixture,and standard purifier

• LASER

• Purge、Carrier gas

• LED、LCD、OLED

• Academic and Research Institutions

• High-efficiency Solar Cell

• Pharmaceutical and Industry