EGS33 CO2 PURIFIER

•Flow range: 10-300Nm3/h

•High precision filter:0.003μm

•Outlet impurities<1ppb

•Fully automatic operation with 24-hour uninterrupted gas supply.

•Remove CH4 impurity

•Service life over 20 years

•316L SS EP Vessel

•Customized according to the different needs of customers

A P P L I C A B L E  G A S

CO₂

M O D E L

EGS33

C R A F T S

CAT+ADS

IMPURITY

OUTLET

ppb

H₂O

<1

O₂

<1

Co

<1

H₂

<1

CH₄

<1

Total Volatile Acids(as SO2)

<0.005

Total Volatile Bases(as NH3)

<0.5

Condensable Organics(HCS>100 amu,as Decane)

<0.15

Non-Condensable Organics(HCS>58 amu,as Toluene)

<1

Refractonies(as HMDSO)

<0.005

PARTICLES

≤1pcs/m³(@0.003μm)

 FLOW    RANGE

1-300Nm³h

Flow range

Nm³/h

Applicable gas

Crafts

Pressure Range

Bar

Reference Dimensions

mm

1-10

CO₂

2 x CAT + 2 x ADS

3.5-10

1200*1200*2050

30-70

CO₂

2 x CAT + 2 x ADS

3.5-10

1400*1400*2050

80-300

CO₂

2 x CAT + 2 x ADS

3.5-10

1850*2200*2050

• Large Scale Integration

• Preform Fabrication

• Discrete Device

• Semiconductor Equipment Integration‌

• Silicon Wafers 、Substrate and Epitaxy

• Ultra-pure,mixture,and standard purifier

• LASER

• Purge、Carrier gas

• LED、LCD、OLED

• Academic and Research Institutions

• High-efficiency Solar Cell

• Pharmaceutical and Industry