EGS14 Large Flow Purifier

•Flow range: 10-5000Nm3/h

•High precision filter:0.003μm

•Outlet impurities<1ppb

•Return to the factory or regenerate on-site

•316L SS EP Vessel

•Customized according to the different needs of customers

APPLICABLE GAS

N₂、H₂、Ar、He、O₂、CDA

M O D E L

EGS14-D

EGS14-M

IMPURITY

INLET

OUTLET

ppm

ppb

ppb

H₂O

<3

<1

<1

O₂

<1

一

<1

H2

<1

一

<1

CO

<1

一

<1

CO₂

<1

<1

<1

NMHC

<1

一

<1

PARTICLES

—

≤1pcs/m³(@0.003μm)

FLOW   RANGE

一

10-100Nm³/h

• Large Scale Integration

• Preform Fabrication

• Discrete Device

• Semiconductor Equipment Integration‌

• Silicon Wafers 、Substrate and Epitaxy

• Ultra-pure,mixture,and standard purifier

• LASER

• Purge、Carrier gas

• LED、LCD、OLED

• Academic and Research Institutions

• High-efficiency Solar Cell

• Pharmaceutical and Industry