EGS22 XCDA PURIFIER

•Flow range: 10-20000Nm3/h

•High precision filter:0.003μm

•Outlet impurities<1ppb

•Fully automatic operation with 24-hour uninterrupted gas supply.

•Service life over 20 years

•316L SS EP Vessel

•Customized according to the different needs of customers

APPLICABLE GAS

XCDA

M O D E L

EGS22

C R A F T S

ADS

IMPURITY

OUTLET

H₂O

<100ppt

CO₂

<100ppt

TOC(as C7H8)

<10ppt

Acids(as   SO₂)

<10ppt

Bases(as  NH₃)

<10ppt

Refractory Compounds(as HMDSO)

<10ppt

PARTICLES

≤1pcs/m³(@0.003μm)

FLOW    RANGE

10-20000Nm³h

Flow range

Nm³/h

Applicable gas

Crafts

Pressure Range

Bar

Reference Dimensions

mm

1-10

XCDA

2 x ADS   

3.5-10

1050*515*1600

30-50

XCDA

2 x ADS   

3.5-10

850*900*2000

60-150

XCDA

2 x ADS   

3.5-10

1350*1150*2100

200-300

XCDA

2 x ADS   

3.5-10

1350*1150*2100

400-1000

XCDA

2 x ADS   

3.5-10

1800*1700*2450

1500-2000

XCDA

2 x ADS   

3.5-10

2690*2390*2700

2500-3500

XCDA

2 x ADS   

3.5-10

2650*2650*2650

4000-6000

XCDA

2 x ADS   

3.5-10

2650*2650*2750

7000-12000

XCDA

3 x ADS   

3.5-10

2900*4600*2750

12000-20000

XCDA

4 x ADS   

3.5-10

2900*4600*2750

• Large Scale Integration

• Preform Fabrication

• Discrete Device

• Semiconductor Equipment Integration‌

• Silicon Wafers 、Substrate and Epitaxy

• Ultra-pure,mixture,and standard purifier

• LASER

• Purge、Carrier gas

• LED、LCD、OLED

• Academic and Research Institutions

• High-efficiency Solar Cell

• Pharmaceutical and Industry