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S series POU purifier
E series POU purifier
High Pressure POU Purifier
H SERIES
SMALL FLOW HEATED PURIFIERS
S SERIES
Nitrogen purifier
EGS8 NITROGEN PURIFIER
EGS9 NITROGEN PURIFIER
Hydrogen purifier
EGS7-A HYDROGEN PURIFIER
EGS7-C HYDROGEN PURIFIER
EGS7-G HYDROGEN PURIFIER
EGS7-H HYDROGEN PURIFIER
Oxygen purifier
EGS6 OXYGEN PURIFIER
EGS6-A OXYGEN PURIFIER
Ammonia gas purifier
EGS21 AMMONIA PURIFIER
XCDA purifier
EGS22 XCDA PURIFIER
Carbon dioxide purifier
EGS32 CO2 PURIFIER
EGS32-H Supercritical CO2 PURIFIER
EGS33 CO2 PURIFIER
Rare gas purifier
EGS5-A RARE GAS PURIFIER
EGS5-G RARE GAS PURIFIER
EGS5-H RARE GAS PURIFIER
High-flow normal-temperature gas purifier
EGS14 Large Flow Purifier
High-pressure purifier
HIGH PRESSURE PURIFIER
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Large-scale integrated circuit manufacturing
Typical gases: N2, O2, H2, Ar, He, XCDA, CO2...
Manufacturing of semiconductor discrete devices
Typical gases: N2, H2, O2...
Production of large-sized silicon wafers
Typical gases: Ar, N2, O2, H2...
Panel and display production
Typical gases: N2, O2, H2, Ar, He...
LED and laser manufacturing
Typical gases: N2, H2, NH3...
Production of optical fiber preforms
Typical gases: N2, O2, He...
Production of high-efficiency solar cells
Typical gases: N2, O2...
Production of ultra-high purity gases, mixed gases and standard gases
Typical gases: N2, Ar, He, H2...
Welding and purging of clean pipelines
Typical gases: N2, Ar...
Purification of carrier gas and zero point gas for analytical instruments
Typical gases: He, N2, Ar, H2, CDA...
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