❖ OVERVIEW
The H Series Purifier is a compact purifier that operates at elevated temperatures using heated getter alloy.Unlike POU ambient temperature purifiers,which primarily rely on catalytic adsorption technology and only utilize surface adsorption,the heated getter alloy technology fully leverages the entire volume of the alloy.Compared to POU purifiers,the H Series heated purifiers offer superior impurity removal efficiency and can remove CH₄,N₂,with longer life time.
❖ CHARACTERISTICS
•Flow range: 0.2-150LPM | •High precision filter:0.003μm |
•Outlet impurities<1ppb | •Automatic Power Control、Temperature、Predictive Maintenance Alert |
•Remove impurities of CH₄and N₂ | •Inlet and outlet valves and Connection size |
•316L SS EP Vessel | •Multiple Options Available |
• Direct Replacement | •Customized according to the different needs of customers |
❖ REMOVAL EFFICIENCY
Remove the impurities such as H2O、O₂、CO、CO₂、H₂、NMHC <1ppb (inlet≥5N ), also can remove acids, bases and refractory compounds.
Applicable gases: N₂、H₂、O₂、Ar、He、Kr、Ne、Xe 、CDA 、CH₄and etc.
❖ INDEX TABLE
Wall-mounted or cabinet options available | |||
Model | Max Flow Rate(SLPM) | Connection Size | Max Pressure Drop(MPA) |
EGH001 | 0.2 | 1/8"sleeve ferrule | 0.05 |
EGH003 | 5 | 1/4"VCR | 0.05 |
EGH050 | 50 | 1/4"VCR | 0.05 |
EGH075 | 75 | 1/4"VCR | 0.05 |
EGH100 | 100 | 1/2"VCR | 0.05 |
EGH150 | 150 | 1/2"VCR | 0.05 |
▶ Note:Only the specification and configuration of the standard models are listed in the table.Please contact EGP for more special requirements.
❖ APPLICATION
• Large Scale Integration | • Preform Fabrication |
• Discrete Device | • Semiconductor Equipment Integration |
• Silicon wafers 、Substrate and Epitaxy | • Ultra-pure,mixture,and standard purifier |
• LASER | • Purge、Carrier gas |
• LED、LCD、OLED | • Academic and Research Institutions |
• High-efficiency Solar Cell | • Pharmaceutical and Industry |
Address：No. 98, Pengcheng Avenue, National Economic Development Zone, Huangshi City, Hubei Province
Company address in Shanghai：No. 510B, Lane 500, Zhangheng Road, Pudong New Area, Shanghai
Shenzhen Company Address: Room 707, Block B, Building 10, Shenzhen Bay Technology Ecological Park, No. 10, High-tech South 9th Road, High-tech Zone Community, Yuehai Street, Nanshan District, Shenzhen City
Wuhan Company Address: Room 718, Building T2, Phase 1, Business Project (Optics Valley Headquarters Center), No. 766, Gaoxin Avenue, East Lake New Technology Development Zone, Wuhan City, Hubei Province
Telephone：Mr. Huang 13631567445
Telephone：Mr. Chen 15072068232
Website：http://www.egp9n.com
