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SMALL FLOW HEATED PURIFIERS

SMALL FLOW HEATED PURIFIERS

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■  OVERVIEW

The H Series Purifier is a compact purifier that operates at elevated temperatures using heated getter alloy.Unlike POU ambient temperature purifiers,which primarily rely on catalytic adsorption technology and only utilize surface adsorption,the heated getter alloy technology fully leverages the entire volume of the alloy.Compared to POU purifiers,the H Series heated purifiers offer superior impurity removal efficiency and can remove CH₄,N₂,with longer life time.

01No need to return EGP for regeneration and can replace GETTER without maintenance once getting saturated (inlet≥5N )

02 Flow range:0.2~150LPM

03 With power, temperature, lifespan warning and other automatic control functions

04 Remove the impurities such as H2O、O₂、CO、CO₂、H₂、NMHC <1ppb (inlet≥5N ),also can remove acids,bases and refractory compounds.

05

Applicable gases:N₂、H₂、O₂、Ar、He、Xe、CDA、CO₂、CH₄

CABINET TYPE

WALL MOUNT

MODEL

Max  Flow  rate

(SLPM)

Connection size

Max pressure drop

(MPA)

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EGH001

0.2

1/8"sleeve ferrule

0.05

EGH003

5

1/4"VCR

0.05

EGH050

50

1/4"VCR

0.05

EGH075

75

1/4"VCR

0.05

EGH100

100

1/2"VCR

0.05

EGH150

150

1/2"VCR

0.05

▶Note:Only the specification and configuration of the standard models are listed in the table.Please contact EGP

for more special requirements.

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