❖ OVERVIEW
POU purifier adopts catalytic adsorption technology to remove the impurities in the source gas at room temperature. POU purifier can be customized according to the different needs of customers(including connection size,length or panel,etc.).
❖ CHARACTERISTICS
• Flow range: 5-4000 LPM | •High precision filter:0.003μm |
• Outlet impurities<1ppb | •Returned to EGP factory for regeneration |
•Inlet and outlet valves and Connection size | |
• 316L SS EP Vessel | •Service life over 20 years |
• CE certificate | •Customized according to the different needs of customers |
❖ REMOVAL EFFICIENCY
Remove the impurities such as H2O、O₂、Co、CO₂、H₂、NMHC <1ppb (inlet≥5N ), also can remove acids, bases and refractory compounds.
Applicable gases: N₂、H₂、O₂、Ar、He、Kr、Ne、Xe 、CDA 、CH₄、CO₂、Cl₂、BF₃、HCl、
GeCl₄、GeH₄、H2S、H2Se、HBr、SiHCl₃ 、SO₂and etc.
❖ POU INDEX TABLE
Model | Max Flow Rate (SLPM) | Avg Flow Rate (SLPM) | Max Operation Pressure (Mpa) | Connection Size | Overall Length (face to face) | Outside Diameter(mm) |
EGP005 | 5 | 0.5 | 6.9 | 1/4"MVCR | 3.31"±0.03" | 38.1(1.5") |
EGP010 | 10 | 1.5 | 6.9 | 1/4"MVCR | 5"±0.03" | 38.1(1.5") |
EGP010A | 10 | 1.5 | 6.9 | 1/4"MVCR | 4.5"±0.03" | 38.1(1.5") |
EGP050 | 50 | 5 | 1.73 | 1/4"MVCR | 8.2"±0.03" | 50.8(2") |
EGP050A | 50 | 5 | 1.73 | 1/4"MVCR | 6.3"±0.03" | 50.8(2") |
EGP060 | 60 | 9 | 1.73 | 1/4"MVCR | 8.2"±0.03" | 76.2(3") |
EGP075 | 75 | 10 | 1.73 | 1/4"MVCR | 7.94"±0.03" | 76.2(3") |
EGP100 | 100 | 12 | 1.73 | 1/4"MVCR | 12.5"±0.03" | 50.8(2") |
EGP120 | 120 | 25 | 1.73 | 1/4"MVCR | 10"±0.03" | 76.2(3") |
EGP250 | 250 | 40 | 1.73 | 1/2"MVCR | 18.2"±0.03" | 76.2(3") |
EGP300 | 300 | 80 | 1.73 | 1/2"MVCR | 17.3"±0.03" | 101.6(4") |
EGP500 | 500 | 80 | 1.73 | 1/2"MVCR | 20"±0.03" | 101.6(4") |
EGP800 | 800 | 200 | 1.73 | 1/2"MVCR | 27.64"±0.06" | 152.4(6") |
EGP1000 | 1000 | 300 | 1.73 | 1/2"MVCR | 39.34"±0.06" | 152.4(6") |
EGP1500 | 1500 | 400 | 1.73 | 3/4"MVCR | 44.66"±0.06" | 152.4(6") |
EGP2000 | 2000 | 1000 | 1.73 | 3/4"MVCR | 50.8"±0.06" | 152.4(6") |
EGP2500 | 2500 | 1500 | 1.73 | 1"MVCR | 62.69"±0.06" | 152.4(6") |
EGP4000 | 4000 | 2000 | 1.73 | 1"MVCR | PANEL | PANEL |
▶ Note:Only the specification and configuration of the standard models are listed in the table.Please contact EGP for more special requirements.
❖ APPLICATION
• Large Scale Integration | • Preform Fabrication |
• Discrete Device | • Semiconductor Equipment Integration |
• Silicon Wafers 、Substrate and Epitaxy | • Ultra-pure,mixture,and standard purifier |
• LASER | • Purge、Carrier gas |
• LED、LCD、OLED | • Academic and Research Institutions |
• High-efficiency Solar Cell | • Pharmaceutical and Industry |
Address：No. 98, Pengcheng Avenue, National Economic Development Zone, Huangshi City, Hubei Province
Company address in Shanghai：No. 510B, Lane 500, Zhangheng Road, Pudong New Area, Shanghai
Shenzhen Company Address: Room 707, Block B, Building 10, Shenzhen Bay Technology Ecological Park, No. 10, High-tech South 9th Road, High-tech Zone Community, Yuehai Street, Nanshan District, Shenzhen City
Wuhan Company Address: Room 718, Building T2, Phase 1, Business Project (Optics Valley Headquarters Center), No. 766, Gaoxin Avenue, East Lake New Technology Development Zone, Wuhan City, Hubei Province
Telephone：Mr. Huang 13631567445
Telephone：Mr. Chen 15072068232
Website：http://www.egp9n.com
