■OVERVIEW
POU purifier adopts catalytic adsorption technology to remove the impurities in the source gas at room temperature.POU purifier can be customized according to the different needs of customers(including connection size,length or panel,etc.).
01 Returned to EGP factory for regeneration,each interval for 1~2 years, with service life over 20 years.
02 High precision filter:0.003μm
03 Flow range：5~4000LPM
04 Remove the impurities such as H2O、O₂、Co、CO₂、H₂、NMHC <1ppb (inlet≥5N ),also can remove acids,bases and refractory compounds.
05 Applicable gases:N₂、H₂、O₂、Ar、He、Kr、Ne、Xe 、CDA 、CH₄ 、CO₂ 、Cl₂ 、BF₃、HCl、
GeCl₄、GeH₄、H2S、H2Se、HBr、SiHCl₃ 、SO₂and etc.
■POU Index Table (Ambient temperature series -Atmospheric pressure)
Model | Max Flow rate (SLPM)
| Avg Flow rate (SLPM)
| Max operation pressure (Mpa)
| Connection size | OAL (face to face) | OD (mm)
|
EGP005 | 5 | 0.5 | 6.9 | 1/4"MVCR | 3.31"±0.03" | 38.1(1.5") |
EGP010 | 10 | 1.5 | 6.9 | 1/4"MVCR | 5"±0.03" | 38.1(1.5") |
EGP010A | 10 | 1.5 | 6.9 | 1/4"MVCR | 4.5"±0.03" | 38.1(1.5") |
EGP050 | 50 | 5 | 1.73 | 1/4"MVCR | 8.2"±0.03" | 50.8(2") |
EGP050A | 50 | 5 | 1.73 | 1/4"MVCR | 6.3"±0.03" | 50.8(2") |
EGP060 | 60 | 9 | 1.73 | 1/4"MVCR | 8.2"±0.03" | 76.2(3") |
EGP075 | 75 | 10 | 1.73 | 1/4"MVCR | 7.94"±0.03" | 76.2(3") |
EGP100 | 100 | 12 | 1.73 | 1/4"MVCR | 12.5"±0.03" | 50.8(2") |
EGP120 | 120 | 25 | 1.73 | 1/4"MVCR | 10"±0.03" | 76.2(3") |
EGP250 | 250 | 40 | 1.73 | 1/2"MVCR | 18.2"±0.03" | 76.2(3") |
EGP300 | 300 | 80 | 1.73 | 1/2"MVCR | 17.3"±0.03" | 101.6(4") |
EGP500 | 500 | 80 | 1.73 | 1/2"MVCR | 20"±0.03" | 101.6(4") |
EGP800 | 800 | 200 | 1.73 | 1/2"MVCR | 27.64"±0.06" | 152.4(6") |
EGP1000 | 1000 | 300 | 1.73 | 1/2"MVCR | 39.34"±0.06" | 152.4(6") |
EGP1500 | 1500 | 400 | 1.73 | 3/4"MVCR | 44.66"±0.06" | 152.4(6") |
EGP2000 | 2000 | 1000 | 1.73 | 3/4"MVCR | 50.8"±0.06" | 152.4(6") |
EGP2500 | 2500 | 1500 | 1.73 | 1"MVCR | 62.69"±0.06" | 152.4(6") |
EGP4000 | 4000 | 2000 | 1.73 | 1"MVCR | 组合盘面 | 组合盘面 |
▶Note:Only the specification and configuration of the standard models are listed in the table.Please contact EGP for more special requirements.
