EGS6-A OXYGEN PURIFIER

•Flow range: 10-50000Nm3/h

•High precision filter:0.003μm

•Outlet impurities<1ppb

•Fully automatic operation with 24-hour uninterrupted gas supply.

•Service life over 20 years

•316L SS EP Vessel

•Customized according to the different needs of customers

APPLICABLE  GAS

O₂

M O D E L

EGS6-A

C R A F T S

ADS

IMPURITY

INLET

OUTLET

ppm

ppb

H₂O

<3

<0.1

CO₂

<2

<0.1

NMHC

<1

<0.1

PARTICLES

——

≤1pcs/m³(@0.003μm)

FLOW RANGE

—

10-50000Nm³h

Flow range

Nm³/h

Applicable gas

Crafts

Pressure Range

Bar

Reference Dimensions

mm

10-10

O₂

2 x ADS   

3.5-10

1050*515*1600

30-50

O₂

2 x ADS   

3.5-10

850*900*2000

60-70

O₂

2 x ADS   

3.5-10

1000*1150*2100

80-300

O₂

2 x ADS   

3.5-10

1350*1150*2100

400-1000

O₂

2 x ADS   

3.5-10

1800*1700*2450

1500-2000

O₂

2 x ADS   

3.5-10

2690*2390*2700

2500-3500

O₂

2 x ADS   

3.5-10

2650*2650*2650

4000-6000

O₂

2 x ADS   

3.5-10

2650*2650*2750

7000-12000

O₂

3 x ADS   

3.5-10

2900*4600*2750

12000-20000

O₂

4 x ADS   

3.5-10

2900*4600*2750

20000-50000

O₂

4 x ADS   

3.5-10

9000*2950*3400

• Large Scale Integration

• Preform Fabrication

• Discrete Device

• Semiconductor Equipment Integration‌

• Silicon Wafers 、Substrate and Epitaxy

• Ultra-pure,mixture,and standard purifier

• LASER

• Purge、Carrier gas

• LED、LCD、OLED

• Academic and Research Institutions

• High-efficiency Solar Cell

• Pharmaceutical and Industry