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S series POU purifier
E series POU purifier
High Pressure POU Purifier
H SERIES
SMALL FLOW HEATED PURIFIERS
S SERIES
Nitrogen purifier
EGS8 NITROGEN PURIFIER
EGS9 NITROGEN PURIFIER
Hydrogen purifier
EGS7-A HYDROGEN PURIFIER
EGS7-C HYDROGEN PURIFIER
EGS7-G HYDROGEN PURIFIER
EGS7-H HYDROGEN PURIFIER
Oxygen purifier
EGS6 OXYGEN PURIFIER
EGS6-A OXYGEN PURIFIER
Ammonia gas purifier
EGS21 AMMONIA PURIFIER
XCDA purifier
EGS22 XCDA PURIFIER
Carbon dioxide purifier
EGS32 CO2 PURIFIER
EGS32-H Supercritical CO2 PURIFIER
EGS33 CO2 PURIFIER
Rare gas purifier
EGS5-A RARE GAS PURIFIER
EGS5-G RARE GAS PURIFIER
EGS5-H RARE GAS PURIFIER
High-flow normal-temperature gas purifier
EGS14 Large Flow Purifier
High-pressure purifier
HIGH PRESSURE PURIFIER
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Large-scale integrated circuit manufacturing
25-11-27
Typical gases: N2, O2, H2, Ar, He, XCDA, CO2...
A 20,000 CMH nitrogen purifier for a 12-inch line in Hefei
25-11-20
...
Manufacturing of semiconductor discrete devices
25-11-27
Typical gases: N2, H2, O2...
5000CMH XCDA purifier for a 12-inch line in Wuhan
25-11-20
...
Production of large-sized silicon wafers
25-11-27
Typical gases: Ar, N2, O2, H2...
A 50-cmh hydrogen purifier for a 12-inch line in Guangdong
25-11-20
...
Panel and display production
25-11-27
Typical gases: N2, O2, H2, Ar, He...
A 30-cmh carbon dioxide purifier for a 12-inch line in Beijing
25-11-20
...
LED and laser manufacturing
25-11-27
Typical gases: N2, H2, NH3...
Production of optical fiber preforms
25-11-27
Typical gases: N2, O2, He...
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