■ INTRODUCTION
XCDA purifier EGS22 operates with multiple adsorption beds connected in parallel,alternating between ambient temperature purification and high-temperature regeneration modes,with service life over 20 years.
■ INDEX TABLE
适用气体APPLICABLE GAS | XCDA |
型 号 M O D E L | EGS22 |
工 艺 C R A F T S | ADS |
杂质IMPURITY | OUTLET |
H₂O | <100ppt |
CO₂ | <100ppt |
TOC(as C,H.) | <10ppt |
Acids(as SO₂) | <10ppt |
Bases(as NH₃) | <10ppt |
Refractory Compounds(as HMDSO) | <10ppt |
PARTICLES | ≤1pcs/m³(@0.003μm) |
流量范围
FLOW RANGE | 10-20000Nm³h |
▶Note:Only the specification and configuration of the standard models are listed in the table.Please contact EGP for more special requirements.
