■ INTRODUCTION
Argon/Helium purifier EGS5-H operates with adsorption beds connected in series to getters.Two adsorption beds are connected in parallel,alternating between ambient temperature purification and high-temperature regeneration modes,with service life over 20 years.Multiple getters are connected in parallel,purifying simultaneously at high temperatures without regeneration.The getters are directly replaced after saturation, with service life over 5years.
■ INDEX TABLE
适用气体APPLICABLE GAS | Ar、He、Kr、Ne、Xe |
型号MODEL | EGS5-A | EGS5-G | EGS5-H |
工艺CRAFTS | ADS | GET | ADS+GET |
杂质IMPURITY | INLET | OUTLET | OUTLET | OUTLET |
ppm | ppb | ppb | ppb |
H₂O | <3 | <1 | <1 | <1 |
O₂ | <1.5 | <1 | <1 | <1 |
Co | <1 | <1 | <1 | <1 |
CO₂ | <1 | <1 | <1 | <1 |
H₂ | <1 | <1 | <1 | <1 |
N₂ | <4 | 一 | <1 | <1 |
CH₄ | <0.5 | 一 | <1 | <1 |
NMHC | <1 | <1 | <1 | <1 |
PARTICLES | 一 | ≤1pcs/m³@0.003μm) |
流量范围FLOW RANGE | — | 10-1000Nm³h | 10-300Nm³h | 10-300Nm³h |
▶ Note:Only the specification and configuration of the standard models are listed in the table.Please contact EGP for more special requirements.
