When artificial intelligence responds to instructions in seconds and smart devices permeate our lives, have you ever thought about how strict the chips hidden behind the technology were when they were born? Wafers the size of fingernails must be forged in the presence of various ultra-high-purity gases. Today, let's take a look at the story of Hubei Jiuen Intelligent Technology Co., Ltd. on how it enables Chinese chips to use "China's ultra-pure electronic gas".
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Hydrogen chloride is a "key specialty gas" in semiconductor manufacturing. Even extremely tiny impurities can leave fatal defects on wafers. In the past, the purification technology of hydrogen chloride gas was held by a very few countries, which became a difficult problem to solve in the industry for many years. Ni Feng, Chief Engineer of Hubei Jiuen Intelligent Technology Co., LTD. Many years ago, when he was working in a foreign company, he was always stopped from the core equipment debugging area. This frustration of "seeing the gap but not being able to touch the key" made him determined to build China's own hydrogen chloride specialty gas purification equipment.
The purification of hydrogen chloride gas hinges on the formula and processing of materials. This requires gradual exploration through a large number of experiments. During that period, the lights in Ni Feng's laboratory never went out, and the team members' eyes were always fixed on the detection screens. The warehouse was already piled up with experimental waste. After more than three hundred formula adjustments, the impurity value on the test screen has stably remained below 15 ppb, and all the persistence has found its answer. Nowadays, the hydrogen chloride gas purification equipment of Hubei Jiuen not only has passed the strict stability test, but also has been adopted by many top domestic enterprises. The advanced semiconductor factory has solved a world-renowned problem recognized by the industry, enabling Chinese chips to use ultra-high-purity hydrogen chloride specialty gas "made in China". This not only fills the domestic gap but also reaches the world level.
The use of photolithography machines has extremely strict requirements for the gas environment. Ultra-high-purity oil-free compressed air -XCDA gas is needed to protect the lenses of the photolithography machines, which is also a necessary challenge that Jiuen must overcome. XCDA gas is the "guardian angel" of photolithography machine lenses. The purity standard of 12 nines, especially impurities such as acids and alkalis, must reach the level of 10 PPTS, which is equivalent to filling a hundred standard stadiums with white ping-pong balls, but only one yellow ping-pong ball is allowed to exist in it. To achieve the ultimate in "precision", the team needs to grind the pore size of the adsorption material to one ten-thousandth of a human hair, so that a grain of rice-sized adsorption material has a huge internal surface area. Such standards were once built by foreign enterprises into an impenetrable technological fortress, and even the threshold for certification erected high walls against domestic equipment.
Having solved the protection problem of the photolithography machine lens, Jiuen has now set its sights on the "high-temperature test". While domestic equipment is still limited to the purification of hydrogen for methane removal at 500℃, Jiuen has taken the lead by achieving an extremely high-temperature hydrogen purification technology for methane removal at 600℃. This is not only a numerical leap but also a significant step for China's semiconductor hydrogen purification technology to reach the world's highest difficulty and standard.
The manufacturing of chips also cannot do without the protection of bulk gases. The quality and stability of high-flow and ultra-high-purity gas equipment are the keys to technological upgrading in the semiconductor industry and the increase in chip production capacity. Today, Jiuen's nitrogen purifier has reached the forefront of the world with the largest single flow rate of 20,000 cubic meters per hour in China and a purity of "ten nines". This highly stable device has built a reliable "barrier" for Chinese chips. On the road of technological breakthroughs, every difficulty overcome is a step closer to self-reliance and controllability, and behind this, there is always the support of industrial forces.
From being a world-renowned conundrum in gas purification to leading the world, Jiuen's steps have never ceased. The meticulous debugging on the equipment and the repeatedly refined formulas to meet the standards all conceal an unwavering dedication to "not neglecting the slightest details". From breaking foreign blockades to achieving world-leading purity, this "persistent effort" has always echoed the original aspiration of "manufacturing first-class purification equipment". In the future, Jiuen's equipment will take the whole country as its base and radiate globally, becoming a core force driving the development of the industry, leading gas purification technology to new heights, and continuing to write the story of breakthroughs in more core fields.
